Semiconductor Industry

Cleanroom System for production of semi-conductors
ISO-Cleanroom class 6 (US. Fed. Stand. cl. 1.000)

• self-supporting, modular construction system
• high energy efficiency
• composite panel-wall fillings
• full glass walls
• innovative sealing system
• air circulation and return air guidance within the walls
• U15 ULPA high performed-filter-fan-module
• flush mounted, dimmable LED cleanroom lighting
• Safety glass doors with LED visualisation
• Energy-Management-System
  (energy-efficient climate control with heat recovery/heat pump)
• fully integrated media supply
• fully integrated regulation

Cleanroom System CleanCell 4.0
ISO-Cleanroom class 7 (US. Fed. Stand. cl. 10.000)

• self-supporting, modular construction system
• high energy efficiency
• composite panel-wall fillings
• full glass walls
• innovative sealing system
• air circulation and return air guidance within the walls
• U15 ULPA high performed-filter-fan-module
• flush mounted, dimmable LED cleanroom lighting
• Safety glass doors with LED visualisation
• Energy-Management-System
  (energy-efficient climate control with heat recovery/heat pump)
• fully integrated media supply
• fully integrated regulation

Cleanroom System for Production of Electronic Components
ISO-Cleanroom class 7 (US. Fed. Stand. cl. 10'000)

• self-supporting, modular construction system
• composite panel-wall fillings
• extensive cleanroom windows
• innovative sealing system
• U15 ULPA high performed-filter-fan-module
• fully integrated, flush mounted cleanroom lighting
• fully integrated air circulation and return air guidance
• fully integrated media supply
• cleanroom sliding doors
• changing room with active pre air purge
• material lock with cleanroom rolling doors
• fully integrated regulation

Cleanroom System for Electronic Devices
ISO-Cleanroom class 8

• modular construction system
• composite panel-wall fillings
• extensive cleanroom windows
• innovative sealing system
• U15 ULPA high performed-filter-fan-module
• fully integrated, flush mounted cleanroom lighting
• fully integrated air circulation and return air guidance
• fully integrated media supply
• changing rooms for personal or material / cleanroom door
  with sensitive switch and mutual door interlocking
  control
• fully integrated regulation

Cleanroom System for Production Semiconductor Optical Systems
ISO-Cleanroom class 6 (US. Fed. Stand. cl. 1'000)

• self-supporting, modular construction system
• composite panel-wall fillings
• extensive cleanroom windows
• innovative sealing system
• U15 ULPA high performed-filter-fan-module
• fully integrated, flush mounted cleanroom lighting
• fully integrated air circulation and return air guidance
• fully integrated media supply
• changing rooms for personal and cleanroom sliding doors
  with sensitive switch and mutual door interlocking
  control
• material lock with cleanroom rolling doors
• fully integrated regulation

Cleanroom System for Microoptic - Wafer Development
ISO-Cleanroom class 6 (US. Fed. Stand. cl. 1'000)

• self-supporting, modular construction system
• composite panel-wall fillings
• extensive cleanroom windows
• innovative sealing system
• U15 ULPA high performed-filter-fan-module
• fully integrated, flush mounted cleanroom lighting
• fully integrated air circulation and return air guidance
• fully integrated media supply
• changing rooms for personal or material / cleanroom door
  with sensitive switch and mutual door interlocking
  control
• fully integrated regulation

Cleanroom System for Semiconductor Production
ISO-Cleanroom class 6 (US. Fed. Stand. cl. 1'000)

• self-supporting, modular construction system
• composite panel-wall fillings
• extensive cleanroom windows
• innovative sealing system
• U15 ULPA high performed-filter-fan-module
• fully integrated, flush mounted cleanroom lighting
• fully integrated air circulation and return air guidance
• fully integrated media supply
• changing rooms for personal or material / cleanroom door
  with sensitive switch and mutual door interlocking
  control
• fully integrated regulation

Cleanroom System for Micro-assembly
ISO-Cleanroom class 7 (US. Fed. Stand. cl. 10'000)

• self-supporting, modular construction system
• composite panel-wall fillings
• extensive cleanroom windows
• innovative sealing system
• U15 ULPA high performed-filter-fan-module
• fully integrated, flush mounted cleanroom lighting
• fully integrated air circulation and return air guidance
• fully integrated media supply
• changing rooms for personal or material / cleanroom door
  with sensitive switch and mutual door interlocking
  control
• fully integrated regulation

Cleanroom System for Circuit Board Production
ISO-Cleanroom class 7 (US. Fed. Stand. cl. 10'000)

• self-supporting, modular cleanroom-profile system with strengthened version for a vast strut distance
• cleanroom ceiling with U15 ULPA high performed -laminarflow-module
• minienvironment made of cleanroom PVC-strip curtains
• built-on cleanroom lighting
• over-flowing area near the ground

Cleanroom System for Data Storage Automation
ISO-Cleanroom class 8 (US. Fed. Stand. cl. 100'000)

• self-supporting, modular cleanroom-profile system
• minienvironment made of cleanroom PVC-film curtains
• changing room for personal
• integrated working-range
• U15 ULPA high performed -laminarflow-module
• built-on cleanroom lighting
• revertive-flowing grill in ceiling system
• over-flowing area near the ground

Cleanroom System for Laser Structuring
ISO-Cleanroom class 9 

• self-supporting, modular construction system
• composite panel-wall fillings
• extensive cleanroom windows
• innovative sealing system
• U15 ULPA high performed-filter-fan-module
• fully integrated, flush mounted cleanroom lighting
• fully integrated air circulation and return air guidance
• fully integrated media supply
• changing rooms for personal or material / cleanroom door
  with sensitive switch and mutual door interlocking
  control
• fully integrated regulation

Cleanroom System for Semiconductor/Thinfilm Production
ISO-Cleanroom class 6 (US. Fed. Stand. cl. 1'000)

• self-supporting, modular construction system
• composite panel-wall fillings
• extensive cleanroom windows
• innovative sealing system
• U15 ULPA high performed-filter-fan-module
• fully integrated, flush mounted cleanroom lighting
• fully integrated air circulation and return air guidance
• fully integrated media supply
• changing rooms for personal or material / cleanroom door
  with sensitive switch and mutual door interlocking
  control
• fully integrated regulation

Vertikalflow Workingbench AL
ISO-Cleanroom class 5 (US. Fed. Stand. cl. 100)

• (W x D x H) 1330 x 720 x 2100 mm
• compact construction
• housing made of cleanroom-aluminium-profile system
• integrated base
• table board coated with melamin
• area’s fillings on side panels made of plexiglas, back panel made of white composite panel
• very quiet filter-fan-module  < 50 dB (A)
• U15 ULPA high performed  filter
• washable PU-prefilter cell G4
• air velocity: 0,2 – 0,7 m/s, adjustable
• integrated  air streamlining
• easy maintenance
• LED cleanroom lighting
• Glass touch panel
• easy commissioning (plug and play)
• clean air power: 1100 m³/h at V= 0,45 m/s
  max. power 1400 m³/h
• table height 780 mm (sitting action)
• option: table height 900 mm (standing action)
• option: also in version with 2 parts
• further options: Vertikalflow ME
• customer specific dimensions on request
• optionally also available in ESD version

Cleanroom Verticalflow Workingbench System Melamin
ISO-Cleanroom class 5 (US. Fed. Stand. cl. 100) 

• (W x D x H)   1260 x 650 x 1980 mm
• compact construction
• frame coated with melamin
• very quiet filter-fan-module  < 50 dB (A)
• U15 ULPA high performed  filter
• washable PU-V prefilter cell G4
• air velocity: 0,2 –0,7 m/s, adjustable
• easy maintenance
• LED cleanroom lighting
• Glas touch panel
• easy commissioning (plug and play)
• clean air power: 1100 m³/h at V= 0,45 m/s
  max. power 1400 m³/h
• with cleanroom table (780mm)
• height dimensions for standing or sitting actions
• customer specific dimensions on request
• optionally also available in ESD version

Cleanroom Verticalflow Workingbench System Melamin
ISO-Cleanroom class 5 (US. Fed. Stand. cl. 100) 

• (W x D x H)   1260 x 650 x 1980 mm
• compact construction
• frame coated with melamin
• very quiet filter-fan-module  < 50 dB (A)
• U15 ULPA high performed  filter
• washable PU-V prefilter cell G4
• air velocity: 0,2 –0,7 m/s, adjustable
• easy maintenance
• LED cleanroom lighting
• Glas touch panel
• easy commissioning (plug and play)
• clean air power: 1100 m³/h at V= 0,45 m/s
  max. power 1400 m³/h
• with cleanroom table (780mm)
• height dimensions for standing or sitting actions
• customer specific dimensions on request
• roller blind with variable height adjustment
• transparent foil with pleating

Vertikalflow Workingbench AL ISO-Cleanroom class 5 (US. Fed. Stand. cl. 100)

• (W x D x H) 1330 x 720 x 2100 mm
• compact construction
• housing made of cleanroom-aluminium-profile system
• integrated base
• table board coated with melamin
• area’s fillings on side panels made of plexiglas, back panel made of white composite panel
• very quiet filter-fan-module  < 50 dB (A)
• U15 ULPA high performed  filter
• washable PU-prefilter cell G4
• air velocity: 0,2 – 0,7 m/s, adjustable
• integrated  air streamlining
• easy maintenance
• LED cleanroom lighting
• Glass touch panel
• easy commissioning (plug and play)
• clean air power: 1100 m³/h at V= 0,45 m/s max. power 1400 m³/h
• table height 780 mm (sitting action)
• option: table height 900 mm (standing action)
• option: also in version with 2 parts
• further options: Vertikalflow ME
• customer specific dimensions on request
• roller blind with variable height adjustment
• transparent foil with pleating