Cleanroom System for Production Semiconductor Optical Systems
ISO-Cleanroom class 6 (US. Fed. Stand. cl. 1'000)
- self-supporting, modular construction system
- composite panel-wall fillings
- extensive cleanroom windows
- innovative sealing system
- U15 ULPA high performed-filter-fan-module
- fully integrated, flush mounted cleanroom lighting
- fully integrated air circulation and return air guidance
- fully integrated media supply
- changing rooms for personal and cleanroom sliding doors
with sensitive switch and mutual door interlocking
control
- material lock with cleanroom rolling doors
- fully integrated regulation