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Air Cushion-Transport System

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Cleanroom Air Cushion-Transport System
ISO-Cleanroom class 5...8
(US. Fed. Stand. cl. 100 ...100'000)

  • ideal fitting for plane substrate like: CD, DVD, display, flat glass, etc.
  • transport length till 10 m
  • flexible stop-and-go system
  • cleanroom air-load-carrying film
  • cleanroom air- transport injector system
  • fully integrated substrate transmitted light-inspection
  • buffer sections
  • fully integrated substrate monitoring
  • transport velocity max. 2 m/s